Academia · 1983

Creation of Thin Oxide Films in a Microwave Oxygen Plasma

verified

Author
Ladislav Bárdos
Imprint
Prague: Academia, 1983
Series
(Rozpravy Československé Akademie Věd: Řada Matemat. A Přírod. Věd; 93,3)
Language
Not recorded
Sources
K10plus record 43536135X

Cite this

Chicago

Bárdos, Ladislav. Creation of Thin Oxide Films in a Microwave Oxygen Plasma. Prague: Academia, 1983.

MLA

Bárdos, Ladislav. Creation of Thin Oxide Films in a Microwave Oxygen Plasma. Academia, 1983.

APA

Bárdos, L. (1983). Creation of Thin Oxide Films in a Microwave Oxygen Plasma. Academia.

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